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Siasun has developed a new generation of vacuum manipulators: capable of transferring wafers with a repeatability of 0.02mm

2024-08-25

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IT Home reported on August 25 that the 2024 World Robot Conference was held in Beijing from August 21 to 25, with 169 companies exhibiting more than 600 innovative products.

According to reports, the vacuum manipulator is a key device responsible for transferring wafers between different workstations in the chip manufacturing process. In cutting-edge process technology, the required repeatability positioning accuracy reaches 0.02mm, which is equivalent to 1/5 of the diameter of a hair. This equipment has long been monopolized by foreign companies and is a veritable "bottleneck" technology.

Siasun has independently developed a new generation of vacuum robot technology and has achieved mass application in China's most advanced chip manufacturing plants.

SIASUN Centaur vacuum robot has leading repeat positioning accuracy, collision protection and AWC intelligent dynamic correction functions. The robot adopts a dual independent design, and the two arms can independently pick up and place wafers without being affected by each other. Compared with traditional robots, the transmission efficiency is greatly improved and it can handle wafers of different sizes.

▲ Dual-arm embodied intelligent grasping station

IT Home noticed that Siasun also exhibited related robot products/systems such as dual-arm embodied intelligent grasping stations, industrial robot 3D vision teaching-free systems, and special robots.

▲ Industrial robot 3D vision teaching-free system

▲ Special robot products