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IT Home reported on July 16 that Korean media The Elec reported that South Korean semiconductor company Jusung Engineering has recently developed atomic layer deposition (ALD) technology.The need for extreme ultraviolet lithography (EUV) process steps can be reduced in the production of advanced process chips.

IT Home Note: Extreme ultraviolet lithography (EUV), also known as extreme ultraviolet lithography, is a lithography technology that uses extreme ultraviolet light wavelengths. It is currently used in advanced processes below 7 nanometers and was widely used in 2020.

Chul Joo Hwang, chairman of Joosung Engineering, said that the current expansion of DRAM and logic chips has reached its limit, so it is necessary to overcome this problem by stacking transistors like NAND.

If the semiconductor industry wants to shrink transistors to smaller sizes, one solution is to stack transistors. One proof of this is that deep ultraviolet (DUV) equipment is expected to be used to produce 3D DRAM.

As stacking becomes more important, demand for ALD machines will increase, Hwang said. ALD equipment is also needed for the production of III-V and IGZO semiconductors.